Examples for Thin Film Measurement

Thin film reflectometer (mm-202) in combination with mm-102 microscope for measuring diamond layers on Si and free standing films from 1 µm up to 3 mm thickness with a combination of reflectometry and spot auto focus.

Example for reflectance spectra of a diamond layer on Si. The red curve represents the measured data, the blue line the fitted curve (measured thickness 62.14 µm).

Layers thicker than 180 µm are measured with the integrated spot autofocus.

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