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Thin Films: Thin films are material layers deposited
on a surface of another material. They are an essential element in many industrial
processes, for example, in semiconductor processes or optical coatings. The thickness
of such films range usually from less than a nanometer (10 Å) to several hundred
micrometers. To perform their desired functions, thin films must have the appropriate
thickness, composition, and other important characteristicsts. These properties must
be measured frequently.
Optical methods are usually the preferred method for thin film measurement. They are
accurate, non-contact and nondestructive. The most two common methods are
spectral reflectance and
ellipsometry.
Both methods share the same physics and theory with their own specific features and
applications.
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