Quality control system mm-202-QC for AFM cantilvers or other MEMS

Based on the mm-202 thin film measurement system and the mm-102 video micrsocopy omt offers a highly automated solution for measuring silicon cantilevers or other silicon based MEMS.

System components are the mm-102 video microscope with infinity corrected optics, built in CCD-camera, fiber optic illumination system and fiber optic micro spot access point for reflectometry measurements, a motorized xyz-stage with encoders on all three axes, and the mm-202 thin film reflectometry system with two light sources and two photo spectrometers. Optional is a macro optics with CCD-camera and dark field illumination for the detection of wafer Ids. The complete system is fully automated. All interactions with the instrument - besides loading and unloading a wafer - are done through the software.

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