Printer-friendly versionPrinter-friendly version
thin film analysis with reflectometer

Thin film analysis with transmission-/reflectometer

omt’s ultra compact, thin film analysis (TFA) device is available for both, scientific and industrial applications. The table-top TFA device utilizes reflection and/or transmission over a large spectral range to determine a wide variety of sample parameters such as film thickness (ranging from 10nm – 100µm), absolute color, moisture content, chemical composition or index of refraction.

The TFA includes an integrated, broadband light source that delivers maximum brightness to the sample and a detection unit based on our state-of-the-art spectrometers.  A custom software package developed by omt’s optical engineers allows for experts and novices to determine the parameters of interest with the TFA.

For in-line, process control applications, various TFA solutions for vacuum operation and harsh environments are available.  Our TFA devices have been successfully incorporated in a variety of factories worldwide for thin film analysis.

For laboratory use, the standard TFA configuration can be expanded to include e.g. additional ports, motorized stages, and video monitoring.  These devices are identical in construction to our process control TFA solutions easing a move from the laboratory to the field.


Standardconfiguration

Light source
Halogen lamp with automatic calibration
Stage
Adjustable Z-chuck

Spectrometer

Wavelength

Bandwidth

Detector

 

380 - 1000 nm

2 nm

CCD

Control / Analysis

Operation software

Analysis software

PC

 

aSpect

on request (regarding application)

MS Windows/XP

Options

Wavelength extension for special samples or measurement tasks

NIR (900 nm - 1700 nm)

 

 

 

InGaAs Spectrometer NIR1700 (900 - 1700 nm)

InGaAs Spectrometer NIR1700, cooled (900 - 1700 nm)

InGaAs Spectrometer NIR2200 (1100 - 2200 nm)

InGaAs Spectrometer NIR2500 (1300 - 2500 nm)

Sample stage

For spatially resolved measurements

 

Mapping modules, motorized, 150 or 200 or 300 mm

Videocamera with µSpot

For transmission measurements Transmission module
For auto focus Z-autofocus system 12 mm, motorized
Light source

 

Xenon flash lamp

Auto reference

Software
For thin film measurements aSpect TF
For customer requirements Analysis software on request
DownloadsSize
TFA_Info.pdf473.33 KB
SheetResistance_Info.pdf449.29 KB