
omt’s ultra compact, thin film analysis (TFA) device is available for both, scientific and industrial applications. The table-top TFA device utilizes reflection and/or transmission over a large spectral range to determine a wide variety of sample parameters such as film thickness (ranging from 10nm – 100µm), absolute color, moisture content, chemical composition or index of refraction.
The TFA includes an integrated, broadband light source that delivers maximum brightness to the sample and a detection unit based on our state-of-the-art spectrometers. A custom software package developed by omt’s optical engineers allows for experts and novices to determine the parameters of interest with the TFA.
For in-line, process control applications, various TFA solutions for vacuum operation and harsh environments are available. Our TFA devices have been successfully incorporated in a variety of factories worldwide for thin film analysis.
For laboratory use, the standard TFA configuration can be expanded to include e.g. additional ports, motorized stages, and video monitoring. These devices are identical in construction to our process control TFA solutions easing a move from the laboratory to the field.
| Light source |
Halogen lamp with automatic calibration |
| Stage |
Adjustable Z-chuck |
|
Spectrometer Wavelength Bandwidth Detector |
380 - 1000 nm 2 nm CCD |
|
Control / Analysis Operation software Analysis software PC |
aSpect on request (regarding application) MS Windows/XP |
| Wavelength extension for special samples or measurement tasks |
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NIR (900 nm - 1700 nm)
|
InGaAs Spectrometer NIR1700 (900 - 1700 nm) InGaAs Spectrometer NIR1700, cooled (900 - 1700 nm) InGaAs Spectrometer NIR2200 (1100 - 2200 nm) InGaAs Spectrometer NIR2500 (1300 - 2500 nm) |
| Sample stage |
|
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For spatially resolved measurements
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Mapping modules, motorized, 150 or 200 or 300 mm Videocamera with µSpot |
| For transmission measurements | Transmission module |
| For auto focus | Z-autofocus system 12 mm, motorized |
| Light source |
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Xenon flash lamp Auto reference |
| Software |
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| For thin film measurements | aSpect TF |
| For customer requirements | Analysis software on request |
| Downloads | Size |
|---|---|
| TFA_Info.pdf | 473.33 KB |
| SheetResistance_Info.pdf | 449.29 KB |