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Spectroscopic ellipsometry is a powerful tool for thin film metrology. omt implements this method in an easy-to-use table-top ellipsometer with an advanced modular optical and mechanical design.
For sophisticated measurements we provide different options like wavelength extension or motorized stages for spatially resolved measurements and auto-focus capabilities.
The spectral ellipsometer utilizes the polarization of light to determine n/k, film thickness (10 nm - 100 µm), or sheet resistance.
| Light source |
halogen lamp |
|
Analyzer Tolerance
|
± 1 mm (height) ± 1° (angle) |
|
Polarimeter Spot size Angle of incidence |
2x4 mm fixed 70°C |
| Stage | adjustable z-chuck |
|
Spectrometer Wavelength Bandwidth Detector |
380 - 1000 nm 2 nm CCD |
|
Control / Analysis Repeatability Time for measurement Operation software Analysis software PC |
< 2 Å (SiO2 on Si) 5 - 15 s VisuEl Scout MS Windows/XP |
| Wavelength extension for special samples | |
|
NIR (900 nm - 1700 nm)
UV (200 nm - 350 nm)
|
Reflector head up to 1700 nm InGaAs Spectrometer NIR1700 (900 - 1700 nm) InGaAs Spectrometer NIR1700, cooled (900 - 1700 nm)
Reflector head down to 200 nm, with autoreference Special UV optics for Ellipsometer |
| Reduction of spot size for high structured samples | |
|
Micro spot option 1 Micro spot option 2 |
100 µm fiber 200 µm fiber |
| Sampel stages |
|
| For spatially resolved measurements |
Mapping modules, motorized, 150 or 200 or 300 mm |
| For accurate positioning of the sample | Tiltangle system with detection unit |
| For auto focus | Z-autofocus system 12 mm, motorized |
| For customer requirements | Customized chuck |
| Angle of incidence | |
| Variable angle, motorized | 50° - 90° |
| Variable angle, 6 fixed positions | 47.5°, 55°, 62.5°, 70°, 77.5°, 90° |
| Downloads | Size |
|---|---|
| Ellipsometer_Info.pdf | 559.8 KB |
